Chemical Vapor Deposition of MoS2 and TiS2 Films from the Metal-Organic Precursors Mo(S-t-Bu)4 and Ti(S-t-Bu)4

Chemistry of Materials

Volumn 9, Issue 8, 1997, Pages 1847-1853

  Cheon, Jinwoo ^a   Gozum, John E ^a   Girolami, Gregory S ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000359939     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm970138p     Document Type: Article

References (79)

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