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Volumn 103, Issue 4, 2008, Pages

Structural, magnetic, and mechanical properties of 5 μm thick SmCo films suitable for use in microelectromechanical systems

(5) Walther, A a,b Givord, D a Dempsey, N M a Khlopkov, K c Gutfleisch, O c

a LABORATOIRE DE CRISTALLOGRAPHIE (France)

b MINATEC (France)

c IFW DRESDEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; MAGNETIC PROPERTIES; MEMS; SPUTTERING;

DEPOSITION TEMPERATURE; IN-PLANE TEXTURE; OPTIMUM PROPERTIES;

THICK FILMS;

EID: 40149087019 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2840131 Document Type: Article

Times cited : (53)

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