Dry etch patterning of LaCaMnO3 and SmCo thin films

Journal of the Electrochemical Society

Volumn 145, Issue 7, 1998, Pages 2512-2516

  Wang, J J ^a   Childress, J R ^a   Pearton, S J ^a,e   Sharifi, F ^b   Dahmen, K H ^c   Gillman, E S ^c   Cadieu, F J ^d,e   Rani, R ^d   Qian, X R ^d   Chen, Li ^d  

^a University of Florida   (United States)

^b Florida State University ^*  (United States)

^c FLORIDA STATE UNIVERSITY   (United States)

^d CITY UNIVERSITY OF NEW YORK   (United States)

^e ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DRY ETCHING; LANTHANUM COMPOUNDS; MORPHOLOGY; PLASMA ETCHING; SAMARIUM COMPOUNDS;

DRY ETCH PATTERNING;

MAGNETIC THIN FILMS;

EID: 0032124210     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838670     Document Type: Article

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