Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7130, Issue , 2008, Pages

  Liu, Chao ^a   He, Yulin ^a   Zhang, Haijun ^a   Zhang, Dongxian ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Deflection; Expansion; Laser; Micro actuator; Photo thermal

Indexed keywords

DEFLECTION (STRUCTURES); ELECTRIC CABLES; ELECTRIC POWER SYSTEMS; ELECTRIC WIRE; EXCIMER LASERS; GAS LASERS; HEATING; IRRADIATION; MECHANICAL VARIABLES MEASUREMENT; MICROACTUATORS; PULSED LASER DEPOSITION; THERMOANALYSIS;

BASIC IDEAS; CONVECTION COEFFICIENTS; DEFLECTION; FEASIBILITY EXPERIMENTS; HEATING PROCESS; LASER DIODES; LASER POWER; LASER SOURCES; MICRO-ACTUATOR; MICROMACHING; MIRCO ACTUATORS; PHOTO-THERMAL; POWER SOURCES; POWER SUPPLY MODES; SHEET MATERIALS; SHEET TEMPERATURES; STEADY-STATE THERMAL ANALYSIS; THIN SHEETS; WIDTH RATIOS;

THERMAL EXPANSION;

EID: 60649118923     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.819575     Document Type: Conference Paper

References (9)

1. Guckel H., Klein J., Christenson T., Skrobis K., Laudon M., and Lovell, E, G., "Thermo-Magnetic Metal Flexure Actuators," Proc. the 5th IEEE Technical Digest Solid State Sensors and Actuator Workshop, 73 -75 (1992).
2. Oliver, A. D., Vigil S, R., and Gianchandani Y. B., "Photothermal Surface-Micromachined Actuators," IEEE Transactions on Electron Devices 50(4), 1156-1157 (2003).
3. Szabo F. R., and Kladitis P. E., "Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots," Proc. ICMENS' 04, 446-452 (2004).
4. Baglio S., Castorina S., Fortuna L., and Savalli N., "Modeling and design of novel photo-thermal-mechanical microactuators," Sensors and Actuators A 101, 185-193 (2002).
5. Yang S. M., and Tao W. Q., [Heat Transfer 3rd edn], Peking: Higher Education Press, Beijing, 215-220 (1980).
6. P. Lerch, C. K. Slimane, B. Romanowicz, and P. Renaud," Modelization and characterization of asymmetrical thermal micro-actuators," Journal of Micromechanics and Microengineering 6, 134-137 (1996).
7. Butler J. T., Bright V. M., and Cowan W. D., "Average power control and positioning of polysilicon thermal actuators," Sensors and Actuators A 72, 88-97 (1999).
8. Chen Y. T, Ma K. J., Tseng A. A., and Chen P. H., "Projection ablation of glass-based single and arrayed microstructures using excimer laser," Optics & Laser Technology 37, 271-280 (2005).
9. Dean J. A., [Lange's Handbook of Chemistry], McGraw-Hill Book Company, New York, 450-452 (1985)