Design, modeling and testing of polysilicon optothermal actuators for power scavenging wireless microrobots

Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Volumn , Issue , 2004, Pages 446-452

  Szabo, Francis R ^a   Kladitis, Paul E ^a  

^a Air Force Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL RESISTIVE HEATING; MICROPOWER SOURCES; POLYSILICON OPTOTHERMAL ACTUATORS; WIRELESS MICROROBOTS;

DEGREES OF FREEDOM (MECHANICS); ELECTROSTATICS; FABRICATION; HEATING; MACHINE DESIGN; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; ROBOTS; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY; THERMAL EXPANSION;

ACTUATORS;

EID: 16244409294     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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