Closed-loop phase-shifting homodyne interferometry using heterodyne phase detection

Applied Optics

Volumn 47, Issue 33, 2008, Pages 6219-6225

  Bitou, Youichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK; HETERODYNING; HOMODYNE DETECTION; INTERFEROMETERS; PHASE SHIFT;

FEEDBACK ERROR SIGNAL; HETERODYNE BEAT; HOMODYNE INTERFEROMETERS; INTERFERENCE FRINGE; LOCK-IN AMPLIFIER; NON-POLARIZING; PHASE DETECTION; PHASE-SHIFTING;

HETERODYNE DETECTION;

EID: 60649115339     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.006219     Document Type: Article

References (16)

1. P. Hariharan, B, F. Oreb, and T. Eiju, "Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987).
2. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, "Phase shifting for nonsinusoidal waveforms with phase-shift errors," J. Opt. Soc. Am. A 12, 761-768 (1995).
3. P. de Groot and L. L. Deck, "Numerical simulations of vibration in phase-shifting interferometry," Appl. Opt. 35, 2172-2178 (1996).
4. H. Kihm and S.-W. Kim, "Fiber-diffraction interferometer for vibration desensitization," Opt. Lett. 30, 2059-2061 (2005).
5. R. Doloca and R. Tutsch, "Vibration induced phase-shift interferometer," Proc. SPIE 6292, 62920Y (2006).
6. R. Doloca, H. Broistedt, and R. Tutsch, "Phase-shift Fizeau interferometer in presence of vibration," Proc. SPIE 7064, 706403 (2008).
7. R. Schödel, "Ultra-high accuracy thermal expansion measurements with PTB's precision interferometer," Meas. Sci. Technol. 19, 084003 (2008).
8. Y. Ishii, J, Chen, and K. Murata, "Digital phase-measuring interferometry with a tunable laser diode," Opt. Lett. 12, 233-235 (1987).
9. Y. Bitou, H. Inaba, F.-L. Hong, T. Takatsuji, and A. Onae, "Phase-shifting interferometry with equal phase steps by use of a frequency-tunable diode laser and a Fabry-Perot cavity," Appl. Opt. 44, 5403-5407 (2005).
10. L. He, "Vibration-compensated interferometry system using phase-modulating interference fringe subdivision technology," Appl. Opt. 45, 7987-7992 (2006).
11. X. Zhao, T. Suzuki, T. Masutomi, and O. Sasaki, "Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement," Opt. Eng. 44, 125602 (2005).
12. R. Onodera and Y. Ishii, "Phase-shift-locked interferometer with a wavelength-modulated laser diode," Appl. Opt. 42, 91-96 (2003).
13. T. Yoshino and H. Yamaguchi, "Closed-loop phase-shifting interferometry with a laser diode," Opt. Lett. 23, 1576-1578 (1998).
14. M. Yokota, A. Asaka, and T. Yoshino, "Stabilization improvements of laser diode closed-loop heterodyne phase-shifting interferometer for surface profile measurement," Appl. Opt. 42, 1805-1808 (2003).
15. Y Bitou, "Phase-shifting interferometry with feedback control using heterodyne phase detection," Opt. Lett. 33, 1777-1779 (2008).
16. M. Takeda, H. Ina, and S. Kobayashi, "Fourier transform method of fringe pattern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).