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Volumn 53, Issue 4, 2008, Pages 347-354
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NEW atmospheric pressure microwave microplasma source
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Author keywords
Argon microplasma; Biomedical applications; Electron density; Gas cleaning; Impedance matching; Microplasma source; Microwave microplasma; Microwelding; Reflection coefficient; Surface modification; Temperature of microplasma
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Indexed keywords
AIR CLEANERS;
APPLICATIONS;
ARGON;
ATMOSPHERIC PRESSURE;
CARRIER CONCENTRATION;
DENSITY OF GASES;
ELECTRIC DISCHARGES;
ELECTRON DENSITY MEASUREMENT;
ELECTRONS;
FLOW RATE;
GASES;
IMPEDANCE MATCHING (ELECTRIC);
INERT GASES;
MICROWAVE GENERATION;
MICROWAVE POWER TRANSMISSION;
MICROWAVES;
PLASMA DISPLAY DEVICES;
REFLECTION;
SURFACE CLEANING;
SURFACE TREATMENT;
ARGON MICROPLASMA;
BIOMEDICAL APPLICATIONS;
ELECTRON DENSITY;
GAS CLEANING;
IMPEDANCE MATCHING;
MICROPLASMA SOURCE;
MICROWAVE MICROPLASMA;
MICROWELDING;
REFLECTION COEFFICIENT;
SURFACE MODIFICATION;
TEMPERATURE OF MICROPLASMA;
PLASMA DEVICES;
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EID: 59849084603
PISSN: 00017043
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (5)
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References (12)
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