Preparation of carbon nanowall by hot-wire chemical vapor deposition and effects of substrate heating temperature and filament temperature

Japanese Journal of Applied Physics

Volumn 47, Issue 11, 2008, Pages 8635-8640

  Shimabukuro, Seiji ^a   Hatakeyama, Yuichi ^a   Takeuchi, Masanori ^a   Itoh, Takashi ^a   Nonomura, Shuichi ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

Carbon nanowall; Filament temperature; Hot wire chemical vapor deposition; Key parameter; Substrate surface temperature

Indexed keywords

ATMOSPHERIC TEMPERATURE; CHEMICAL VAPOR DEPOSITION; FILAMENTS (LAMP); HEATING; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; VAPORS; WIRE;

CARBON NANOWALL; FILAMENT TEMPERATURE; HOT-WIRE CHEMICAL VAPOR DEPOSITION; KEY PARAMETER; SUBSTRATE SURFACE TEMPERATURE;

SUBSTRATES;

EID: 58749107139     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.8635     Document Type: Article

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