In situ observation of atomic hydrogen etching on diamond-like carbon films produced by pulsed laser deposition

Applied Surface Science

Volumn 174, Issue 3-4, 2001, Pages 251-256

  Cheng, C L ^a   Chia, C T ^b   Chiu, C C ^a   Wu, C C ^a   Cheng, H F ^b   Lin, I N ^c  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Diamond like carbon; Hydrogen etching; PLD; Raman spectroscopy

Indexed keywords

BINDING ENERGY; ETCHING; FILM PREPARATION; GRAPHITIZATION; HYDROGEN; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY;

ATOMIC HYDROGEN ETCHING;

DIAMOND LIKE CARBON FILMS;

EID: 0035971540     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00170-2     Document Type: Article

References (16)