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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3094, Issue , 1997, Pages 288-294

Ellipsometry for correctly determining the void fraction and true refractive index of thin films

(1) Tolmachev, Vladimir A a

a VAVILOV STATE OPTICAL INSTITUTE (Russian Federation)

Author keywords

Adsorption; Attachment; Condensed water; Effective media; Pore; True refractive index; Vacuum; Void fraction

Indexed keywords

ADSORPTION; DEWATERING; ELLIPSOMETRY; ENERGY ABSORPTION; HAFNIUM COMPOUNDS; LIGHT REFRACTION; POLARIMETERS; REFRACTIVE INDEX; REFRACTOMETERS; SILICON COMPOUNDS; VACUUM;

ATTACHMENT; CONDENSED WATER; EFFECTIVE MEDIA; PORE; TRUE REFRACTIVE INDEX;

VOID FRACTION;

EID: 58649103958 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.271828 Document Type: Conference Paper

Times cited : (6)

References (9)

1
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2
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3
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4
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- The Accurate Determination of Optical Properties by Ellipsometry
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- Aspnes, D.E.¹

5
- 0042174700
- Determining the porosity and true index of refraction of thin films by ellipsometry
- May
- V.A.Tolmachiev, M.A.Okatov, and E.F.Matsoian, "Determining the porosity and true index of refraction of thin films by ellipsometry", Sov. J. Opt. Technol., 60(5) 327-329 May (1993).
- (1993) Sov. J. Opt. Technol , vol.60 , Issue.5 , pp. 327-329
- Tolmachiev, V.A.¹ Okatov, M.A.² Matsoian, E.F.³

6
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7
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- Adsorption-ellipsometric method for determining optical constant of thin porous films
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- V.A.Tolmachev,M.A.Okatov, and T.V.Leonova "Adsorption-ellipsometric method for determining optical constant of thin porous films", in Ellipsometry: Theory, Methods, and Applications. K.KSvitashev and A.S.Mardejov,ed.,Nauka, Novosibirsk,1991,252. p.
- (1991) Ellipsometry: Theory, Methods, and Applications , pp. 252
- Tolmachev, V.A.¹ Okatov, M.A.² Leonova, T.V.³

8
- 0001367758
- V.A.Tolmachev and E.A.Konshina, Ellipsometric study of a-C:H films, Diamond and Related Materials,1996 (to be publ.).
- V.A.Tolmachev and E.A.Konshina, "Ellipsometric study of a-C:H films," Diamond and Related Materials,1996 (to be publ.).

9
- 58649088443
- 3-SnO2
- unpublished
- 2 film," (unpublished).
- film
- Onohov, A.P.¹ Tolmachev, V.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.