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Volumn 5, Issue 12, 1996, Pages 1397-1401
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Ellipsometric study of a-C:H films
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Author keywords
Ellipsometry; Hydrocarbons; Porosity; Refractive index
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Indexed keywords
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EID: 0001367758
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(96)00551-1 Document Type: Article |
Times cited : (19)
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References (10)
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