Electron inelastic scattering and secondary electron emission calculated without the single pole approximation

Journal of Applied Physics

Volumn 104, Issue 11, 2008, Pages

  Mao, S F ^a   Li, Y G ^a   Zeng, R G ^a   Ding, Z J ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION ALGORITHMS; COPPER; ELECTRON EMISSION; ENERGY DISSIPATION; EXPERIMENTS; INELASTIC SCATTERING; MONTE CARLO METHODS; POLES; POLYNOMIAL APPROXIMATION; SCATTERING; SECONDARY EMISSION;

ELECTRON INELASTIC MEAN FREE PATHS; ENERGY DISTRIBUTIONS; ENERGY LOSS FUNCTIONS; ENERGY RANGES; EXPERIMENTAL DATUMS; LOW ENERGIES; MONTE CARLO SIMULATIONS; SECONDARY ELECTRON EMISSIONS; SECONDARY ELECTRONS; SINGLE POLE APPROXIMATIONS; STOPPING POWERS;

ELECTRONS;

EID: 58149267452     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3033564     Document Type: Article

References (77)

1. A. J. Dekker, Solid State Phys. 6, 251 (1958). 0081-1947
2. O. Hachenberg and W. Brauer, Adv. Electron. Electron Phys. 11, 413 (1959). 0065-2539
3. H. Seiler, J. Appl. Phys. 0021-8979 10.1063/1.332840 54, R1 (1983).
4. D. C. Joy, Scanning 17, 270 (1995). 0161-0457
5. C. J. Powell and A. Jablonski, J. Phys. Chem. Ref. Data 0047-2689 10.1063/1.556035 28, 19 (1999).
6. D. R. Penn, Phys. Rev. B 0163-1829 10.1103/PhysRevB.35.482 35, 482 (1987).
7. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 0142-2421 10.1002/sia.740111107 11, 577 (1988).
8. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 0142-2421 10.1002/sia.1997 37, 1 (2005).
9. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 0142-2421 10.1002/sia.2092 37, 978 (2005).
10. S. Tanuma, C. J. Powell, and D. R. Penn, J. Appl. Phys. 0021-8979 10.1063/1.2891044 103, 063707 (2008).
11. A. Jablonski, S. Tanuma, and C. J. Powell, J. Appl. Phys. 0021-8979 10.1063/1.2891047 103, 063708 (2008).
12. Handbook of Optical Constant of Solid II, edited by, E. D. Palik, (Academic, New York, 1991).
13. J. Lindhard, Mat. Fys. Medd. K. Dan. Vidensk. Selsk. 28, 1 (1954).
14. Z. J. Ding and R. Shimizu, Surf. Sci. 0039-6028 10.1016/0039-6028(89) 90362-2 222, 313 (1989).
15. K. O. Jensen and A. B. Walker, Surf. Sci. 0039-6028 10.1016/0039-6028(93) 90392-W 292, 83 (1993).
16. E. Shiles, T. Sasaki, M. Inokuti, and D. Y. Smith, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.1612 22, 1612 (1980).
17. H. J. Hagemann, W. Gudat, and C. Kunz, DESY Report SR-74/7 (Deutsches Elektron-Synchrotron, Hamburg, 1974).
18. Z. J. Ding, Scanning 18, 92 (1996). 0161-0457
19. Z. J. Ding, H. M. Li, X. D. Tang, and R. Shimizu, Appl. Phys. A: Mater. Sci. Process. 0947-8396 10.1007/s00339-002-1994-3 78, 585 (2004).
20. Z. J. Ding, X. D. Tang, and R. Shimizu, J. Appl. Phys. 0021-8979 10.1063/1.1331645 89, 718 (2001).
21. R. Shimizu and Z. J. Ding, Rep. Prog. Phys. 0034-4885 10.1088/0034-4885/55/4/002 55, 487 (1992).
22. N. F. Mott, Proc. R. Soc. London, Ser. A 0950-1207 10.1098/rspa.1929.0127 124, 425 (1929).
23. M. S. Chung and T. E. Everhart, Phys. Rev. B 15, 4699 (1977).
24. J. P. Ganachaud and M. Cailler, Surf. Sci. 0039-6028 10.1016/0039- 6028(79)90059-1 83, 498 (1979); J. P. Ganachaud and M. Cailler, Surf. Sci. 0039-6028 10.1016/0039-6028(79)90060-8 83, 519 (1979).
25. J. M. Fernandez-Varea, F. Salvat, M. Dingfelder, and D. Liljequist, Nucl. Instrum. Methods Phys. Res. B 0168-583X 10.1016/j.nimb.2004.12.002 229, 187 (2005).
26. J. C. Ashley, J. Electron Spectrosc. Relat. Phenom. 0368-2048 10.1016/0368-2048(88)80019-7 46, 199 (1988).
27. C. J. Tung, J. C. Ashley, and R. H. Ritchie, Surf. Sci. 0039-6028 10.1016/0039-6028(79)90110-9 81, 427 (1979).
28. H. Bethe, Ann. Phys. 0003-3804 10.1002/andp.19303970303 397, 325 (1930).
29. D. C. Joy and S. Luo, Scanning 11, 176 (1989). 0161-0457
30. D. C. Joy, S. Luo, R. Gauvin, P. Hovington, and N. Evans, Scanning Microsc. 10, 653 (1996). 0002-7820
31. H. J. Fitting, Phys. Status Solidi A 0031-8965 10.1002/pssa.2210260216 26, 525 (1974).
32. K. O. Al-Ahmad and D. E. Watt, J. Phys. D 0022-3727 10.1088/0022-3727/16/ 11/028 16, 2257 (1983).
33. N. Ishigure, C. Mori, and T. Watanabe, J. Phys. Soc. Jpn. 44, 973 (1978). 0031-9015
34. F. W. Garber, M. Y. Nakai, J. A. Harter, and R. D. Birkhoff, J. Appl. Phys. 0021-8979 10.1063/1.1660159 42, 1149 (1971).
35. S. Luo, X. Zhang, and D. C. Joy, Radiat. Eff. Defects Solids 117, 235 (1991).
36. H. A. Bethe and J. Ashkin, in Experimental Nuclear Physics, edited by, E. Segre, (Wiley, New York, 1953), p. 166.
37. A. S. Davydov, Quantum Mechanics (Addison-Wesley, Reading, MA, 1968), p. 404.
38. V. I. Ochkur, Sov. Phys. JETP 18, 503 (1964). 0038-5646
39. T. C. Tucker, L. D. Roberts, C. W. Nestor, Jr., and T. A. Carlson, Phys. Rev. 178, 998 (1969).
40. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 0142-2421 10.1002/sia.740210302 21, 165 (1994).
41. H. Kanter, Phys. Rev. B 1, 522 (1970).
42. T. Huen and F. Wooten, Solid State Commun. 0038-1098 10.1016/0038- 1098(71)90501-1 9, 871 (1971).
43. T. A. Callcott and E. T. Arakawa, Phys. Rev. B 11, 2750 (1975).
44. C. J. Powell, R. J. Stein, P. B. Needham, Jr., and T. J. Driscoll, Phys. Rev. B 16, 1370 (1977).
45. H. Beilschmidt, I. S. Tilinin, and W. S. M. Werner, Surf. Interface Anal. 0142-2421 10.1002/sia.740220129 22, 120 (1994).
46. A. Jablonski and P. Jiricek, Surf. Sci. 412-413, 42 (1998). 0039-6028
47. D. E. Eastman, J. A. Knapp, and F. J. Himpsel, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.41.825 41, 825 (1978).
48. J. A. Knapp, F. J. Himpsel, and D. E. Eastman, Phys. Rev. B 0163-1829 10.1103/PhysRevB.19.4952 19, 4952 (1979).
49. G. Gergely, M. Menyhard, K. Pentek, A. Sulyok, A. Jablonski, B. Lesiak, and Cs. Daroczi, Vacuum 0042-207X 10.1016/0042-207X(94)00137-5 46, 591 (1995).
50. B. Lesiak, A. Jablonski, J. Zemek, and P. Jiricek, Surf. Interface Anal. 0142-2421 10.1002/(SICI)1096-9918(19980501)26:5<400::AID-SIA385>3.3.CO;2-S 26, 400 (1998).
51. M. Inokuti, Rev. Mod. Phys. 0034-6861 10.1103/RevModPhys.43.297 43, 297 (1971).
52. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 0142-2421 10.1002/sia.740200112 20, 77 (1993).
53. P. Zacharias, Z. Phys. 256, 92 (1972).
54. K. Goto, K. Ishikawa, T. Koshikawa, and R. Shimizu, Surf. Sci. 0039-6028 10.1016/0039-6028(75)90195-8 47, 477 (1975).
55. A. Dubus, J. C. Dehaes, J. P. Ganachaud, A. Hafni, and M. Cailler, Phys. Rev. B 0163-1829 10.1103/PhysRevB.47.11056 47, 11056 (1993).
56. L. Reimer and C. Tolkamp, Scanning 3, 35 (1980). 0161-0457
57. D. A. Moncrieff and P. R. Barker, Scanning 1, 195 (1976). 0161-0457
58. R. Bongeler, U. Golla, M. Kussens, L. Reimer, B. Schendler, R. Senkel, and M. Spranck, Scanning 15, 1 (1993). 0161-0457
59. R. Shimizu, J. Appl. Phys. 0021-8979 10.1063/1.1663552 45, 2107 (1974).
60. J. Philibert and E. Weinryb, in Proceedings of the Third International Conference on X-ray Optics and Microanalysis, edited by, H. H. Pattee, V. E. Cosslett, and, A. Engstrom, (Academic, New York, 1963), p. 163; E. Weinryb and J. Philibert, C. R. Acad. Sc. Paris 256, 4535 (1964).
61. M. Kanter, Phys. Rev. 121, 681 (1961).
62. W. Czaja, J. Appl. Phys. 0021-8979 10.1063/1.1708005 37, 4236 (1966).
63. H. Bruining and J. M. De Boer, Physica 5, 17 (1938). 0031-8914
64. K. Kanaya and M. Kawakatsu, J. Phys. D 0022-3727 10.1088/0022-3727/5/9/ 330 5, 1727 (1972).
65. D. B. Wittry, in Proceedings of the Fourth International Conference on X-ray Optics and Microanalysis, edited by, R. Castaing, P. Deschamps, and, J. Philibert, (Hermann, Paris, 1966), p. 168.
66. N. R. Whetten, Methods in Experimental Physics (Academic, New York, 1962), Vol. IV.
67. I. M. Bronstein and B. S. Fraiman, Vtorichnaya Elektronnaya Emissiya (Nauka, Moscow, 1969), p. 340.
68. T. Koshikawa and R. Shimizu, J. Phys. D 0022-3727 10.1088/0022-3727/6/11/ 312 6, 1369 (1973).
69. A. Septier and M. Belgarovi, IEEE Trans. Electr. Insul. 0018-9367 10.1109/TEI.1985.348896 EI-20, 725 (1985).
70. H. E. Bishop, Ph.D. thesis, Cambridge, 1963.
71. H. Drescher, L. Reimer, and M. Seidel, Z. Angew. Phys. 29, 331 (1970). 0044-2283
72. P. Palluel, Compt. Rend. 224, 1492 (1947).
73. M. M. El-Gomati and A. M. D. Assad, Mikrochim. Acta, Suppl. 15, 325 (1998).
74. H. J. Hunger and L. Kuchler, Phys. Status Solidi A 0031-8965 10.1002/pssa.2210560157 56, K45 (1979).
75. K. F. J. Heinrich, in Proceedings of the Fourth International Conference on X-ray Optics and Microanalysis, edited by, R. Castaing, P. Deschamps, and, J. Philibert, (Hermann, Paris, 1966), p. 159.
76. V. E. Cosslett and R. N. Thomas, Br. J. Appl. Phys. 16, 779 (1965).
77. E. J. Sternglass, Phys. Rev. 95, 345 (1954).