Megasonic cleaning of wafers in electrolyte solutions: Possible role of electro-acoustic and cavitation effects

Microelectronic Engineering

Volumn 86, Issue 2, 2009, Pages 132-139

  Keswani, M ^a   Raghavan, S ^a   Deymier, P ^a   Verhaverbeke, S ^b  

^a University of Arizona   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

Cavitation; Cleaning; Electro acoustic; Electrolyte; Megasonic; Pressure amplitude; Wafer

Indexed keywords

ACOUSTICS; CAVITATION; CHLORINE COMPOUNDS; ELECTROACOUSTIC TRANSDUCERS; ELECTROLYSIS; ELECTROLYTES; FOURIER ANALYSIS; FOURIER TRANSFORMS; HYDRODYNAMICS; ORGANIC POLYMERS; POTASSIUM; REMOVAL; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON WAFERS; VAN DER WAALS FORCES; VIBRATION ANALYSIS;

ACOUSTIC POTENTIALS; ACOUSTIC PRESSURES; ADHESION FORCES; AS MODELS; CAVITATION EFFECTS; EFFECT OF IONIC STRENGTHS; ELECTRO-ACOUSTIC; ELECTROLYTE SOLUTIONS; FOURIER TRANSFORMATIONS; IONIC VIBRATION POTENTIALS; LOWER POWER DENSITIES; MEGASONIC; MEGASONIC CLEANINGS; PARTICLE REMOVALS; POTASSIUM CHLORIDES; POWER DENSITIES; PRESSURE AMPLITUDE; PRESSURE DATUMS; SILICA PARTICLES; SOUND WAVES; TIME DEPENDENTS; TWO TYPES; VIBRATION POTENTIALS; WAFER;

IONIC STRENGTH;

EID: 58149265335     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.09.042     Document Type: Article

References (24)

1. Wolf S., and Tauber R.N. Silicon Processing for the VLSI Era. second ed. Process Technology vol. 1 (2000), Lattice Press
2. ITRS, The International Technology Roadmap for Semiconductors, 2006.
3. K. Muralidharan, M. Keswani, H. Shende, P. Deymier, S. Raghavan, F. Eschbach, A. Sengupta, Experimental and simulation investigations of acoustic cavitation in megasonic cleaning, in: Proceedings of SPIE, 65171E, 2007.
4. Bakhtaria K., Guldiken R., Makaram P., Busnaina A., and Park J. Journal of The Electrochemical Society 153 9 (2006) G846-G850
5. Busnaina A., Lin H., and Moumen N. IEEUSEMI Advanced Semiconductor Manufacturing Conference (2000) 328-333
6. Gale G., and Busnaina A. Particulate Science and Technology 17 3 (1999) 229-238
7. Debye P. The Journal of Chemical Physics 1 (1933) 13-16
8. Zana R., and Yeager E. The Journal of Physical Chemistry 71 13 (1967) 521-535
9. Vidal S., Simonin J., and Turq P. The Journal of Physical Chemistry 99 (1995) 6733-6738
10. Hermans J. Philosophical Magazine 25 (1938) 426
11. Hermans J. Philosophical Magazine 25 (1938) 674
12. Rutgers A. Physica 5 (1938) 46
13. Marlow B., Fairhurst D., and Pendse H. Langmuir 4 (1988) 611-626
14. Pollock D. Physical Properties of Materials for Engineers. second ed. (1993), CRC Press p. 502
15. Yeager E., Dietrick H., and Hovorka H. The Journal of the Acoustical Society of America 25 3 (1953) 456-460
16. Kumar A. Journal of Chemical and Engineering Data 48 (2003) 388-391
17. Spitzer L., Bergmann P., Frank P., Yaspan A., and Herring C. Physics of Sound in the Sea (1945), Solar Analysis Group
18. Flynn H. In: Mason W. (Ed). Physical Acoustics vol. 1B (1964), Academic Press 85 (Chapter 9)
19. Walton A., and Reynolds G. Advances in Physics 33 (1984) 595
20. Young F.R. Cavitation (1989), McGraw-Hill, London
21. Lauterborn W. The Journal of the Acoustical Society of America 59 (1976) 283-293
22. Ackler H., French R., and Chiang Y. Journal of Colloid and Interface Science 179 (1996) 460-469
23. Kumar G., and Beaudoin S. Journal of the Electrochemical Society 153 2 (2006) G175-G181
24. Bergstrom L. Advances in Colloid and Interface Science 70 1 (1997) 125-169