Thermal conductivity of Si/SiGe superlattice films

Journal of Applied Physics

Volumn 104, Issue 11, 2008, Pages

  Liu, Chun Kai ^a   Yu, Chih Kuang ^a   Chien, Heng Chieh ^a   Kuo, Sheng Liang ^a   Hsu, Chung Yen ^a   Dai, Ming Ji ^a   Luo, Guang Li ^b   Huang, Shih Chiang ^b   Huang, Mei Jiau ^c  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN EQUATION; CARBON FIBER REINFORCED PLASTICS; ELECTRIC NETWORK ANALYSIS; PHONONS; THERMAL CONDUCTIVITY; THERMAL INSULATING MATERIALS; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THERMOELECTRICITY; VACUUM; VACUUM DEPOSITION;

BOLTZMANN TRANSPORTS; EFFECTIVE THERMAL CONDUCTIVITIES; EXPERIMENTAL MEASUREMENTS; INTERFACE RESISTANCES; INTERFACE ROUGHNESSES; INTRINSIC SCATTERINGS; LAYER THICKNESSES; MEAN FREE PATHS; PHONON TRANSPORTS; SI0.8GE0.2; SIZE CONFINEMENT EFFECTS; SUPERLATTICE FILMS; SUPERLATTICE PERIODS; THEORETICAL ANALYSES; THERMAL RESISTANCES; ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITIONS;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 58149259988     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3032602     Document Type: Article

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