Chemical-assisted laser parallel nanostructuring of silicon in optical near fields

Nanotechnology

Volumn 19, Issue 45, 2008, Pages

  Guo, Wei ^a   Wang, Zeng Bo ^a   Li, Lin ^a   Liu, Zhu ^a   Luk'yanchuk, Boris ^b   Whitehead, David J ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; CHEMICALS;

ALKALINE SOLUTIONS; CHEMICAL SOLUTIONS; ETCHING PROCESSES; HEXAGONAL ARRAYS; LENS ARRAYS; NANOSTRUCTURING; NEAR FIELDS; OPTICAL NEAR FIELDS; OPTICAL-; SILICON SURFACES; SINGLE LASER PULSES;

PULSED LASER APPLICATIONS;

NANOMATERIAL; SILICON;

ALKALINITY; ARTICLE; LASER; METHODOLOGY; NANOARRAY; NANOCHEMISTRY; NANOFABRICATION; PRIORITY JOURNAL; SURFACE PROPERTY;

EID: 58149240174     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/45/455302     Document Type: Article

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