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Volumn 8, Issue 10, 2008, Pages 5566-5570
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Formation and microstructural properties of locally distributed ZnSiO 3 nanoparticles embedded in a SiO 2 layer by using a focused electron beam
a b b c |
Author keywords
Focused electron beam; Nanocrystal formation mechanism; Si substrate; ZnO thin film; ZnSiO 3 nanocrystal
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Indexed keywords
FOCUSED ELECTRON BEAM;
NANOCRYSTAL FORMATION MECHANISM;
SI SUBSTRATE;
ZNO THIN FILM;
ZNSIO 3 NANOCRYSTAL;
ELECTRON BEAMS;
ELECTRON GUNS;
ELECTRON IRRADIATION;
ELECTRONS;
EXPLOSIVE ACTUATED DEVICES;
IMAGE ENHANCEMENT;
METALLIC FILMS;
NANOCRYSTALLINE ALLOYS;
NANOCRYSTALS;
NANOPARTICLES;
OPTICAL FILMS;
PARTICLE BEAMS;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTING ZINC COMPOUNDS;
SILICON;
SILICON COMPOUNDS;
THIN FILM DEVICES;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
ZINC OXIDE;
SUBSTRATES;
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EID: 58149238158
PISSN: 15334880
EISSN: None
Source Type: Journal
DOI: 10.1166/jnn.2008.1349 Document Type: Conference Paper |
Times cited : (4)
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References (21)
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