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Volumn 41, Issue 3, 2009, Pages 448-453
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Catalytic growth of boron nitride nanotubes using gas precursors
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Author keywords
Boron nitride nanotubes (BNNTs); Catalyst; Chemical vapor deposition (CVD); Low temperature; Plasma
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
BORON;
BORON NITRIDE;
CARBON NANOTUBES;
CATALYSIS;
COBALT;
FILM GROWTH;
GAS MIXTURES;
GROWTH (MATERIALS);
LOW PRESSURE CHEMICAL VAPOR DEPOSITION;
MICROSCOPES;
MICROWAVES;
NANOTUBES;
NITRIDES;
PLASMA DEPOSITION;
PLASMAS;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
SPECTRUM ANALYSIS;
STRUCTURAL PROPERTIES;
SUBSTRATES;
TRANSITION METALS;
TRANSMISSION ELECTRON MICROSCOPY;
VAPORS;
BORON NITRIDE NANOTUBES (BNNTS);
CATALYST FILM THICKNESSES;
CATALYTIC GROWTHS;
ENERGY DISPERSIVE;
GAS PRECURSORS;
HEXAGONAL BORON NITRIDES;
LOW TEMPERATURE;
MICROWAVE PLASMAS;
OPTIMUM COMBINATIONS;
PATTERNED GROWTHS;
PRECURSOR GASSES;
SCANNING ELECTRON MICROSCOPES;
SELECTED AREA DIFFRACTIONS;
SUBSTRATE TEMPERATURES;
TRANSMISSION ELECTRON MICROSCOPES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
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EID: 58149161705
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physe.2008.09.009 Document Type: Article |
Times cited : (38)
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References (22)
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