Influence of diborane flow rate on the structure and stability of CVD boron nitride films

Journal of Physical Chemistry

Volumn 100, Issue 6, 1996, Pages 2148-2153

  Gomez Aleixandre, C ^a   Essafti, A ^a   Fernandez, M ^b   Fierro, J L G ^b   Albella, J M ^b  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b INSTITUTO DE CATÁLISIS Y PETROLEOQUÍMICA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040896631     PISSN: 00223654     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp951200d     Document Type: Article

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