On the application of the Boltzmann equation to the simulation of fluid structure interaction in micro-electro-mechanical-systems

Sensor Letters

Volumn 6, Issue 1, 2008, Pages 121-129

  Cercignani, C ^a   Frangi, A ^a   Frezzotti, Aldo ^a   Ghiroldi, G P ^a   Gibelli, L ^a   Lorenzani, S ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Boltzmann equation; Damping; Generalized Reynolds equation; MEMS

Indexed keywords

AERODYNAMICS; BEARINGS (STRUCTURAL); BOUNDARY VALUE PROBLEMS; DAMPING; ELECTROMECHANICAL DEVICES; FLOW OF GASES; FLUID STRUCTURE INTERACTION; GAS DYNAMICS; GASES; LUBRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MODEL STRUCTURES; SEMICONDUCTING SILICON COMPOUNDS; SURFACE CHEMISTRY; THEOREM PROVING; THREE DIMENSIONAL;

BOUNDING SURFACES; COUETTE FLOWS; DAMPING FORCES; EXPERIMENTAL DATUMS; FLUID STRUCTURES; GAS FLOWS; GENERAL BOUNDARY CONDITIONS; GENERALIZED REYNOLDS EQUATION; KNUDSEN NUMBERS.; LUBRICATION FILMS; MICROMECHANICAL STRUCTURES; MOVING SURFACES; NUMERICAL RESULTS; PARALLEL PLATES; RAREFIED GAS FLOWS; RAREFIED GASSES; SLIDER BEARINGS; STOKES MODELS; TRANSITIONAL FLOW REGIMES;

BOLTZMANN EQUATION;

EID: 58049195461     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2008.003     Document Type: Conference Paper

References (25)

1. G. E. Karniadakis and A. Beskok, Micro Flows, Fundamentals, and Simulation, Springer, New York (2002).
2. T. Veijola, H. Kuisma, J. Lahdempera, and T. Ryhanen, Sensors & Actuators 48, 239 (1995).
3. T. Veijola, H. Kuisma, and J. Lahdempera, Sensors & Actuators 66, 83 (1998).
4. C. Cercignani and A. Daneri, J. Appl. Phys. 34, 3509 (1963).
5. M. A. Gallis and J. R. Torczynski, J. Microelectromech. Syst. 13, 653 (2004).
6. A. Frangi and J. Tausch, Engng. Analysis with Boundary Elem. 29, 886 (2005).
7. S. Fukui and R. Kaneko, JSME International Journal 30, 1660 ( 1987).
8. S. Fukui and R. Kaneko, J. Tribology 110, 253 (1988).
9. C. Cercignani, M. Lampis, and S. Lorenzani, Proceedings of 24th International Symposium on Rarefied Gas Dynamics, AIP, Melville, NY (2005), Vol. 762, p. 719.
10. S. C. Kang, R. M. Crone, and M. S. Jhon, J. Appl. Phys. 85, 5594 (1999).
11. C. Cercignani, M. Lampis, and S. Lorenzani, Phys. Fluids 18, 087102 (2006).
12. C. Cercignani, The Boltzmann Equation and Its Applications, Springer, New York (1988).
13. P. L. Bhatnagar, E. P. Gross, and M. Krook, Phys. Rev. 94, 511 ( 1954).
14. C. Cercignani and G. Tironi, II Nuovo Cimento 43, 64 (1966).
15. E. P Gross and S. Ziering, Phys. Fluids 1, 215 (1958).
16. E. P. Gross and E. A. Jackson, Phys. Fluids 2, 432 (1959).
17. C. Cercignani, M. Lampis, and S. Lorenzani, Transp. Theory and Stat. Physics 33, 545 (2004).
18. C. Cercignani, M. Lampis, and S. Lorenzani, Phys. Fluids 16, 3426 (2004).
19. S. Albertoni, C. Cercignani, and L. Gotusso, Phys. Fluids 6, 993 (1963).
20. C. E. Siewert, Physics of Fluids 15, 1696 (2003).
21. F. Sharipov, Eur. J. Mech. B Fluids 22, 133 (2003).
22. N. Nishimura, Applied Mech. Reviews 55, 299 (2002).
23. L. Greengard and V. Rokhlin, Acta Numerica 6, 229 (1997).
24. F. J. Alexander, A. L. Garcia, and B. J. Alder, Phys. Fluids 6, 3854 (1994).
25. J. Z. Jiang, C. Shen, and J. Fan, Proceedings of 24th International Symposium on Rarefied Gas Dynamics, AIP, Melville, NY (2005), Vol. 762, p. 180.