Indium phosphide based membrane photodetector for optical interconnects on silicon

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 2008, Pages 302-303

  Binetti, P R A ^a   Leijtens, X J M ^a   De Vries, T ^a   Oei, Y S ^a   Raz, O ^a   Di Cioccio, L ^b   Fedeli, J M ^b   Lagahe, C ^c   Orobtchouk, R ^d   Van Campenhout, J ^e   Van Thourhout, D ^e   Van Veldhoven, P J ^a   Notzel R ^a   Smit, M K ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b CEA LETI   (France)

^c TRACIT Technologies   (France)

^d INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^e GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM PHOSPHIDE; OPTICAL INTERCONNECTS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; SEMICONDUCTING SILICON COMPOUNDS;

DETECTOR FABRICATIONS; FUTURE GENERATIONS; IC PROCESSING; NEW RESULTS; PHOTONIC CIRCUITS; PROCESSING STEPS; RF CHARACTERIZATIONS; SOI WAFERS; WAFER SCALES;

SILICON WAFERS;

EID: 58049142023     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/LEOS.2008.4688610     Document Type: Conference Paper

References (6)

1. International Technology Roadmap for Semiconductors (ITRS), http://public.itrs.net.
2. L. Di Cioccio et al., "Recent results on advanced molecular wafer bonding technology for 3D integration on silicon," in Wafer Bonding Conference. Quebec, 2005.
3. D. Van Thourhout, J. V. Campenhout, P. Rojo-Romeo, P. Regreny, C. Seassal, P. Binetti, X. Leijtens, R. Nötzel, M. Smit, L. Di Cioccio, C. Lagahe, J.-M. Fedeli, and R. Baets, "Picmos - a photonic interconnect layer on cmos," in Proc. 33rd Eur. Conf. on Opt. Comm. (ECOC '07). Berlin, Germany, Sep. 16-20 2007, p. 6.3.1.
4. P. Binetti, X. Leijtens, M. Nikoufard, T. de Vries, Y. Oei, L. D. Cioccio, J.-M. Fedeli, C. Lagahe, R. Orobtchouk, C. Seassal, J. V. Campenhout, D. V. Thourhout, P. van Veldhoven, R. Nötzel, and M. Smit, "InP-based Membrane Photodetectors for Optical Interconnects to Si," in Proc. 4th Group IV Photonics 2007. Tokyo, Japan, Sep. 19-21 2007.
5. B. Han, R. Orobtchouk, T. Benyattou, P. Binetti, S. Jeannot, J.-M. Fedeli, and X. Leijtens, "Comparison of optical passive integrated devices based on three materials for optical clock distribution," in Proc. 13th Eur. Conf. on Int. Opt. (ECIO '07). Copenhagen, Denmark, April 25-27 2007, p. ThF3.
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