Wafering of silicon crystals

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 4, 2006, Pages 659-669

  Moller H J ^a  

^a TU BERGAKADEMIE FREIBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC INTERACTION; HYDRODYNAMIC BEHAVIOR; MICROSCOPIC FRACTURE; SILICON CRYSTALS;

CRYSTALS; FRACTURE; HYDRODYNAMICS; PRESSURE EFFECTS; SILICON WAFERS;

SILICON;

EID: 33645309351     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200564508     Document Type: Conference Paper

References (16)

1. R. Wells, Solid State Technol. 30, 63 (1987).
2. A. Endrös, D. Franke, Ch. Häßler, J. Kaleis, W. Koch, and H. J. Möller, in: Handbook of Photovoltaic Engineering, edited by A. Luque and S. Hegedus (Wiley-VCH, Weinheim, 2002).
3. R. K. Sahoo, V. Prasad, I. Kao, J. Talbott, and K. Gupta, ASME J. Electron. Packag. 120, 131 (1998).
4. M. Bhagavat, V. Prasad, and I. Kao, J. Tribol. 122, 394 (2000).
5. F. Yang and I. Kao, ASME J. Electron. Packag. 123, 254 (2001).
6. C. Funke and H. J. Möller, Freiberger Forschungshefte, B 327, 206 (2004).
7. H. J. Möller, Adv. Eng. Mater. 6, 501 (2004).
8. C. Funke and H. J. Möller, in: Proceedings 19th European PV Solar Energy Conf., WIP - München, ETA - Paris, 2004, p. 1266.
9. I. Kao, S. Wei, and P. Chiang, in: Proceedings of NSF Design & Manufacturing Grantees Conf., Seattle, WA, 1997, p. 239.
10. M. Buijs and K. Korpel-van Houten, Wear, 166, 237 (1993).
11. M. Buijs and K. Korpel-van Houten, J. Mater. Sci. 28, 3014 (1993).
12. A. G. Evans and D. B. Marshall, in: Fundamentals of Friction and Wear (ASM, Metals Park, OH, 1981), p. 441.
13. S. Malkin and J. E. Ritter, ASME, J. Eng. Ind. 111, 167 (1989).
14. B. Lawn, in: Fracture of Brittle Solids (Cambridge University Press, 1993).
15. M. Verspui and G. de With, J. Europ. Ceram. Soc. 17, 473 (1997).
16. B. J. Hamrock, in: Fundamentals of Fluid Film Lubrication, NASA Ref. Publication 1225 (McGraw-Hill, New York, 1991).