Transient thermal analysis of micromachined silicon bridge

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 280-287

  Yuasa, Hiroyasu ^a   Ohya, Seishiro ^a   Karasawa, Shiro ^a   Kodato, Setsuo ^a   Akimoto, Kenji ^a  

^a Port and Airport Research Institute   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEMS; ETCHING; HETEROJUNCTIONS; MICROMACHINING; SEMICONDUCTING SILICON; THERMAL CONDUCTIVITY; THERMAL EFFECTS;

NEGATIVE FEEDBACK; SILICON MICROBRIDGE; TRANSIENT THERMAL ANALYSIS;

SEMICONDUCTOR DEVICES;

EID: 0030382058     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250962     Document Type: Conference Paper

References (13)