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Proceedings of SPIE - The International Society for Optical Engineering
Volumn 7155, Issue , 2008, Pages
Study on key algorithm for scanning white-light interferometry
Author keywords

Numerical simulation; Profile measurement; White light interferometry; Zero order fringes
Indexed keywords

COMPUTER SIMULATION; FREQUENCY DOMAIN ANALYSIS; INTERFEROMETERS; LIGHT MEASUREMENT; MATHEMATICAL MODELS; SCANNING;
EID: 57649099461     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.814597     Document Type: Conference Paper
Times cited : (13)
References (12)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.