Accurate broadband RLCG-parameter extraction with TRL calibration

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2008, Pages 41-46

  Wojnowski, Maciej ^a   Engl, Mario ^a   Issakov, Vadim ^a   Sommer, Grit ^a   Weigel, Robert ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Measurement uncertainty; On wafer measurements; Repeatability; TRL calibration

Indexed keywords

BANDPASS FILTERS; CALIBRATION; ELECTRIC LINES; EXTRACTIVE METALLURGY; MICROWAVES; PARAMETER EXTRACTION; POWER TRANSMISSION; SCATTERING PARAMETERS; SENSITIVITY ANALYSIS; SYSTEMATIC ERRORS; TRANSMISSION LINE THEORY;

ALTERNATIVE METHODS; CAUSAL RELATIONSHIPS; CHARACTERISTIC IMPEDANCES; COPLANAR TRANSMISSION LINES; EQUIVALENT CIRCUIT PARAMETERS; IMAGINARY PARTS; MEASUREMENT UNCERTAINTY; ON-WAFER MEASUREMENTS; REPEATABILITY; SPIRAL INDUCTORS; TRANSMISSION LINES; TRL CALIBRATION; TRL CALIBRATIONS;

UNCERTAINTY ANALYSIS;

EID: 57349151648     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2008.4633324     Document Type: Conference Paper

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