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Journal of Chemical Physics

Volumn 129, Issue 21, 2008, Pages

Atom abstraction and gas phase dissociation in the interaction of XeF 2 with Si(100)

(4) Hefty, R C a Holt, J R a Tate, M R a Ceyer, S T a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSTRACTING; ADSORPTION; ATOMIC PHYSICS; DISSOCIATION; ENERGY CONSERVATION; GAS ADSORPTION; GAS DYNAMICS; GASES; MOLECULAR DYNAMICS; MOLECULES; SCATTERING; SILICON; XENON;

AND SCATTERINGS; ATOM ABSTRACTIONS; BOND AXES; GAS PHASE; MOLECULAR BEAM SURFACE SCATTERINGS; PRODUCT MOLECULES; REACTION ENERGIES; ROVIBRATIONAL EXCITATIONS; SI(100); SINGLE ATOMS; TRANSITION STATES; XENON DIFLUORIDE;

ATOMS;

EID: 57349083348 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.3025901 Document Type: Article

Times cited : (10)

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