Fluorine atom abstraction by Si(100). I. Experimental

Journal of Chemical Physics

Volumn 111, Issue 8, 1999, Pages 3679-3695

  Tate, M R ^a   Gosalvez Blanco, D ^a   Pullman, D P ^a,b   Tsekouras, A A ^a,c   Li, Y L ^a   Yang, J J ^a   Laughlin, K B ^a   Eckman, S C ^a   Bertino, M F ^a   Ceyer, S T ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b SAN DIEGO STATE UNIVERSITY   (United States)

^c UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000193952     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.479677     Document Type: Article

References (64)

1. D. D. Eley and E. K. Rideal, Nature (London) 146, 401 (1940);
2. Proc. R. Soc. London, Ser. A 178, 429 (1941);
3. D. D. Eley, Proc. R. Soc. London, ibid. 178, 452 (1941).
4. Y. L. Li, D. P. Pullman, J. J. Yang et al., Phys. Rev. Lett. 74, 2603 (1995);
5. S. T. Ceyer, Proc. R. A. Welch Found. Conf. Chem. Res. XXXVIII: Chemical Dynamics of Transient Species (Welch Foundation, Houston, 1994), pp. 156-172;
6. D. P. Pullman and S. T. Ceyer, Abstracts of Am. Chem. Soc. 207, 168 (1994).
7. H. F. Winters and J. W. Coburn, Surf. Sci. Rep. 14, 161 (1992).
8. M. L. Yu and L. A. DeLouise, Surf. Sci. Rep. 19, 285 (1994).
9. J. R. Engstrom, M. M. Nelson, and T. Engel, Phys. Rev. B 37, 6563 (1988).
10. J. R. Engstrom, M. M. Nelson, and T. Engel, Surf. Sci. 215, 437 (1989).
11. E. R. Behringer, H. C. Flaum, D. J. Sullivan, D. P. Masson, E. J. Lanzendorf, and A. C. Kummel, J. Phys. Chem. 99, 12863 (1995).
12. E. W. Kuipers, A. Vardi, A. Danon, and A. Amirav, Phys. Rev. Lett. 66, 116 (1991).
13. C. T. Rettner, Phys. Rev. Lett. 69, 383 (1992).
14. F. H. Stillinger and T. A. Weber, Phys. Rev. Lett. 62, 2144 (1989);
15. T. A. Weber and F. H. Stillinger, J. Chem. Phys. 92, 6239 (1990).
16. C. J. Wu and E. A. Carter, Phys. Rev. B 45, 9065 (1992);
17. P. C. Weakliem, C. J. Wu, and E. A. Carter, Phys. Rev. Lett. 69, 200 (1992);
18. P. C. Weakliem and E. A. Carter, J. Chem. Phys. 98, 737 (1993).
19. L. E. Carter, S. Khodabandeh, P. C. Weakliem, and E. A. Carter, J. Chem. Phys. 100, 2277 (1994);
20. L. E. Carter and E. A. Carter, J. Phys. Chem. 100, 873 (1996).
21. L. E. Carter and E. A. Carter, J. Vac. Sci. Technol. A 12, 2235 (1994);
22. L. E. Carter and E. A. Carter, Surf. Sci. 323, 39 (1995).
23. T. A. Schoolcraft and B. J. Garrison, J. Vac. Sci. Technol. A 8, 3496 (1990);
24. T. A. Schoolcraft, A. M. Diehl, A. B. Steel, and B. J. Garrison, J. Vac. Sci. Technol. ibid. 13, 1861 (1995).
25. M. R. Tate, D. P. Pullman, D. Gosalvez-Blanco, A. A. Tsekouras, Y. L. Li, and S. T. Ceyer, J. Chem. Phys. (submitted).
26. S. T. Ceyer, D. J. Gladstone, M. McGonigal, and M. T. Schulberg, Physical Methods of Chemistry, edited by B. W. Rossiter and R. C. Baetzold, 2nd ed. (Wiley, New York, 1993), Vol. IXA, p. 383.
27. D. Gosalvez-Blanco, Ph.D. thesis, Massachusetts Institute of Technology, 1997.
28. D. R. Miller, Atomic and Molecular Beam Sources, edited by G. Scoles (Oxford University Press, New York, 1988).
29. P. K. Sharma, E. L. Knuth, and W. S. Young, J. Chem. Phys. 64, 4345 (1976).
30. V. H. Reis and J. B. Fenn, J. Chem. Phys. 39, 3240 (1963).
31. A. Ishizaka and Y. Shiraki, J. Electrochem. Soc. 133, 666 (1986).
32. H. C. Straub, P. Renault, B. G. Lindsay, K. A. Smith, and R. F. Stebbings, Phys. Rev. A 52, 1115 (1995).
33. Commission on Atomic Weights and Isotopic Abundances, "Table of isotopic compositions of the elements as determined by mass spectrometry," 1989.
34. F. A. Stevie and M. J. Vasile, J. Chem. Phys. 74, 5106 (1981).
35. H. C. Straub and K. A. Smith (private communication).
36. M. J. Cardillo and G. E. Becker, Phys. Rev. B 21, 1497 (1980).
37. H. F. Winters and F. A. Houle, J. Appl. Phys. 54, 1218 (1983).
38. J. J. Yang, Ph.D. thesis, Massachusetts Institute of Technology, 1993.
39. T. R. Hayes, R. C. Wetzel, and R. S. Freund, Phys. Rev. A 35, 578 (1987).
40. Using a calculated value of 148 kcal/mol for Si-F bond energy [C. J. Wu et al., J. Am. Chem. Soc. 113, 9061 (1991)], 7 kcal/mol for π bond energy of Si dimers
41. [M. P. D'Evelyn et al., J. Chem. Phys. 96, 852 (1992);
42. 2 bond energy, exothermicity is estimated to be 103 kcal/mol.
43. M. G. Evans and M. C. Polanyi, Trans. Faraday Soc. 35, 178 (1939).
44. T. J. Chuang, Phys. Rev. Lett. 42, 815 (1979).
45. D. A. King and M. G. Wells, Surf. Sci. 29, 454 (1972).
46. J. A. Jensen, C. Yan, and A. C. Kummel, Science 267, 493 (1995).
47. C. W. Lo, P. R. Varekamp, D. K. Shuh, T. D. Durbin, V. Chakarian, and J. A. Yarmoff, Surf. Sci. 292, 171 (1993).
48. L. E. Carter and E. A. Carter, Surf. Sci. 360, 200 (1996).
49. H. Brune, J. Wintterlin, R. J. Behm, and G. Ertl, Phys. Rev. Lett. 68, 624 (1992);
50. H. Brune, J. Wintterlin, J. Trost, G. Ertl, J. Wiechers, and R. J. Behm, J. Chem. Phys. 99, 2128 (1993).
51. B. Kasemo and J. Harris, Surf. Sci. 105, L281 (1981).
52. S. Caratzoulas, B. Jackson, and M. Persson, J. Chem. Phys. 107, 6420 (1997);
53. D. Shalashilin and B. Jackson, J. Chem. Phys. ibid. 109, 2856 (1998).
54. S. L. Tang, J. D. Beckerle, M. B. Lee, and S. T. Ceyer, J. Chem. Phys. 84, 6488 (1986).
55. J. Wintterlin, R. Schuster, and G. Ertl, Phys. Rev. Lett. 77, 123 (1996).
56. J. V. Barth, T. Zambelli, J. Wintterlin, and G. Ertl, Chem. Phys. Lett. 270, 152 (1997).
57. L. Österland, I. Zoric, and B. Kasemo, Phys. Rev. B 55, 15452 (1997).
58. D. J. Driscoll, W. Martir, J. X. Wang, and J. H. Lunsford, J. Am. Chem. Soc. 107, 58 (1985).
59. X. L. Zhou, S. R. Coon, and J. M. White, J. Chem. Phys. 94, 1613 (1991).
60. J. L. Lin and B. E. Bent, J. Am. Chem. Soc. 115, 2849 (1993);
61. P. W. Kash, D. H. Sun, M. Xi, G. W. Flynn, and B. E. Bent, J. Phys. Chem. 100, 16621 (1996).
62. Y. Liu, D. P. Masson, and A. C. Kummel, Science 276, 1681 (1997).
63. J. Strömquist, L. Hellberg, B. Kasemo, and B. I. Lundqvist, Surf. Sci. 352, 435 (1996).
64. S. T. Ceyer and co-workers, to be published.