Abatement of trichloromethane by using nonthermal plasma reactors

Plasma Chemistry and Plasma Processing

Volumn 28, Issue 6, 2008, Pages 663-676

  Mok, Y S ^a   Lee, S B ^a   Oh, J H ^a   Ra, K S ^b   Sung, B H ^b  

^a Jeju National University   (South Korea)

^b Fine Semitech Corporation   (South Korea)

Author keywords

Byproducts; Destruction; Halogenated carbon; Nonthermal plasma; Trichloromethane

Indexed keywords

BARRIER DISCHARGE REACTORS; DESTRUCTION; DESTRUCTION EFFICIENCIES; DIELECTRIC TUBES; EFFECT OF OXYGENS; HALOGENATED CARBON; INPUT POWERS; NITROGEN MOLECULES; NONTHERMAL PLASMA; NONTHERMAL PLASMA REACTORS; OXYGEN CONTENTS; PACKED BED REACTORS; REACTIVE SPECIES; TRICHLOROMETHANE;

DISCHARGE (FLUID MECHANICS); HALOGENATION; OXYGEN; PACKED BEDS; PLASMAS; SURFACE DISCHARGES;

ELECTRIC DISCHARGES;

EID: 57249089057     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-008-9151-1     Document Type: Article

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