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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2473-2477

Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication

(2) Keathley, P D a Hastings, J T a

a UNIVERSITY OF KENTUCKY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MATERIALS; DEPOSITED FILMS; DUAL MODES; FLUORINATED ETHYLENE PROPYLENES; PLASMON RESONANCES; REFRACTIVE INDEX CHANGES; SILICON SUBSTRATES;

CHEMICAL SENSORS; DEPOSITION RATES; ETHYLENE; GLASS; LIGHT REFRACTION; OPTICAL MATERIALS; OPTICAL PROPERTIES; OPTICAL SENSORS; ORGANIC POLYMERS; PLASMONS; PROPYLENE; REFRACTIVE INDEX; REFRACTOMETERS; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON; SPECTROSCOPIC ELLIPSOMETRY; SURFACE PLASMON RESONANCE; SURFACES; THICK FILMS; TWO PHASE FLOW;

SURFACE PROPERTIES;

EID: 57249086304 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.3013368 Document Type: Article

Times cited : (6)

References (11)

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