Implementation of high quality-factor on-chip tuned microwave resonators at 7 GHz

Microwave and Optical Technology Letters

Volumn 51, Issue 2, 2009, Pages 497-501

  Melik, Rohat ^a   Demir, Hilmi Volkan ^a  

^a Institute of Materials Science and Nanotechnology   (Turkey)

Author keywords

Fabrication; Microwave; Quality factor; Resonators; Tuning

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; DESIGN; ENERGY DISSIPATION; FABRICATION; MICROWAVE DEVICES; MICROWAVES; NATURAL FREQUENCIES; POWER INDUCTORS; Q FACTOR MEASUREMENT; RESISTORS; RESONANCE; TIMING CIRCUITS; TUNING;

ANALYTICAL MODELING; CHIP SIZES; CHIP-SCALE; CONVENTIONAL APPROACHES; ENERGY LOSS; EXPERIMENTAL CHARACTERIZATIONS; FREQUENCY RANGES; HIGH QUALITIES; LC TANKS; MICROWAVE; MICROWAVE RESONATORS; NEW DESIGNS; NUMERICAL SIMULATIONS; ON CHIPS; OPTIMAL DESIGNS; Q FACTORS; QUALITY-FACTOR; RESONANCE FREQUENCIES; RESONATOR DESIGNS; SKIN DEPTHS;

RESONATORS;

EID: 57149130846     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.24103     Document Type: Article

References (15)

1. J.N. Burghartz, D.C. Edelstein, K.A. Jenkins, and Y.H. Kwark, Spiral inductors and transmission lines in silicon technology using copperdamascene interconnects and low-loss substrates, IEEE Trans Microwave Theory Tech 45 (1997), 1961-1968.
2. K. Okada, H. Sugawara, H. Ito, K. Itoi, M. Sato, H. Abe, T. Ito, and K. Masu, On-chip high-Q variable inductor using wafer-level chipscale package technology, IEEE Trans Electron Devices 53 (2006), 2401-2406.
3. P. Wu and Z. Yu. A micromechanical high-Q resonator based on hybrid cavity, In Microwave Conference Proceedings. 2005. p. 3.
4. I. Bahl, Lumped elements for RF and microwave circuits, Artech House, London, 2003.
5. C.A. Tavernier, R.M. Henderson, and J. Papapolymerou, A hybrid micromachined high-Q cavity resonator at 5.8 GHz. Tn Proceedings of the 30th European Microwave Conference, 2000, p. 125.
6. H.-ju Hsu, M.J. Hill. R.W. Ziolkowski, and J. Papapolymerou. A duroid-based planar EBG cavity resonator filter with improved quality factor, IEEE Antennas Wireless Propag Lett 1 (2002), 67-70.
7. D.M. Pozar, Microwave engineering, Wiley, New York, 2005.
8. Y.K. Koutsoyannopoulos and Y. Papananos. Systematic analysis and modeling of integrated inductors and transformers in RF IC design, IEEE Trans Circuits Syst 47 (2000), 699-713.
9. J.R. Long and M.A. Copeland, The modeling, characterization, and design of monolithic inductors for silicon RF IC's, IEEE J Solid-State Circuits 32 (1997), 357-369.
10. C.P. Yue, C. Ryu, J. Lau. T.H. Lee, and S.S. Wong. A physical model for planar spiral inductors on silicon. In IEEE International Electron Device Meeting. 1996, p. 155.
11. R. Ludwig and P. Bretchko, RF circuit design, Prentice Hall, New Jersey, 2000.
12. H.M. Greenhouse, Design of planar rectangular microelectronic inductors, IEEE Trans Parts Hybrids Packag 10 (1974). 101-109.
13. T.H. Lee. The design of CMOS radio-frequency integrated circuits, Cambridge University Press, New York, 1998.
14. A. Zolfaghari, A. Chan, and B. Razavi. Stacked inductors and transformers in CMOS technology, IEEE J Solid-State Circuits 36 (2001), 620-628.
15. C.P. Yue and S.S. Wong, On-chip spiral inductors with patterned ground shields for Si-based RF IC's, IEEE J Solid-State Circuits 33 (1998). 743-752.