Effects of doping on the elastic properties of silicon

Materials Science and Engineering: B

Volumn 154-155, Issue 1-3, 2008, Pages 126-128

  Santen, Nicole ^a   Vianden, Reiner ^a  

^a UNIVERSITY OF BONN   (Germany)

Author keywords

Elastic properties; PAC; Perturbed angular correlation; Silicon; Strain

Indexed keywords

SILICON;

ANGULAR CORRELATION METHOD; BORON-DOPING; DOPANT ATOMS; EFFECT OF DOPING; ELASTIC PROPERTIES; HIGHER PERFORMANCE DEVICES; PERTURBED ANGULAR CORRELATION; PHOSPHORUS DOPING; STRAINED-SILICON;

ELASTICITY;

EID: 56949088827     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.08.020     Document Type: Article

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