High tunability of highly (100)-oriented lead zirconate titanium thin films

Journal of the American Ceramic Society

Volumn 91, Issue 11, 2008, Pages 3786-3788

  Wu, Jiagang ^a   Xiao, Dingquan ^a   Wang, Yuanyu ^b   Zhu, Jianguo ^a   Zhu, Jiliang ^a   Xie, Ruishi ^a  

^a SICHUAN UNIVERSITY   (China)

^b GUIZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELECTRIC FIELDS; LEAD; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PLATINUM; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; THICK FILMS; THIN FILMS; TITANIUM; ZIRCONIUM;

APPLIED ELECTRIC FIELDS; BIAXIAL TENSILE STRESSES; DIELECTRIC TUNABILITY; ELECTRICALLY TUNABLE APPLICATIONS; HIGH TUNABILITY; IN PLANES; LEAD ZIRCONATE; POLAR AXIS; PT(111); PZT FILMS; RF MAGNETRON SPUTTERING; SI (100) SUBSTRATES; TITANIUM THIN FILMS; TUN ABILITIES;

MAGNETRON SPUTTERING;

EID: 56749150305     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2008.02709.x     Document Type: Article

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