Multiple deposition of Ga-doped ZnO thin films on COP substrate for the fabrication of transparent conductive films

IDW '07 - Proceedings of the 14th International Display Workshops

Volumn 2, Issue , 2007, Pages 613-616

  Miyake, A ^a   Yamada, T ^a   Makino, H ^a   Kishimoto, S ^b   Yamamoto, N ^a   Yamamoto, T ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b KOCHI NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; GALLIUM COMPOUNDS; OLEFINS; ZINC OXIDE;

CYCLO OLEFIN POLYMER (COP); GA-DOPED ZNO (GZO) FILM;

THIN FILMS;

EID: 43349107703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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3. T. Maeda, H. Agura, T. Aoki, A. Suzuki, T. Matsushita, M. Okuda, "Optimization of transparent conducting ZnO films deposited on PVC substrate by PLD method", IEE J Transactions on Electronics, Information and Systems, pp.132-133, Vol. 126 (2006)
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6. M. Tanaka, H. Makino, R. Chikugo, T. Sakemi and K. Awai, "Application of the Ion Plating Process Utilized High Stable Plasma to the Deposition Technology", J. Vac. Soc. Jpn., pp. 435-439, Vol. 44 (2001)
7. T. Yamada, A. Miyake, S. Kishimoto, H. Makino, N. Yamamoto and T. Yamamoto, "Low-resistivity Ga-doped ZnO thin films of less than 100 nm thickness prepared by ion plating with direct current arc discharge", Appl. Phys. Lett. 91 (2007) 051915.