X-ray prism lenses with large apertures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7077, Issue , 2008, Pages

  Simon, M ^a   Reznikova, E ^b   Nazmov, V ^b   Last, A ^b   Jark, W ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

High aspect ratio microstructures; Large aperture; SU 8; X ray lithography; X ray prism lenses

Indexed keywords

APPLICATIONS; ASPECT RATIO; ELECTRON TUBES; LENSES; MASKS; MICROSTRUCTURE; OPTICAL INSTRUMENT LENSES; OPTICAL INSTRUMENTS; OPTICAL PROPERTIES; OPTICAL SYSTEMS; PHOTORESISTS; PRESSURE DROP; PRISMS; RADIOGRAPHY; SPECTROSCOPIC ANALYSIS; TRANSPARENCY; X RAY APPARATUS; X RAY LITHOGRAPHY; X RAY OPTICS; X RAYS;

BASIC CONCEPTS; FRESNEL; FRESNEL LENSES; HIGH ASPECT RATIO MICROSTRUCTURES; HIGH ASPECT RATIOS; HIGH TRANSPARENCIES; LARGE APERTURE; LARGE APERTURES; LARGE ASPECT RATIOS; MICROSTRUCTURE TECHNOLOGIES; SIDE-WALLS; SINGLE PRISMS; SMALL APERTURES; SU-8; SYNCHROTRON SOURCES; TRIANGULAR STRUCTURES; WORKING DISTANCES; X-RAY PRISM LENSES;

X RAY TUBES;

EID: 56249135926     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.795423     Document Type: Conference Paper

References (7)

1. J. Susini et al., Proceedings of the Seventh International Conference on X-ray Microscopy, ESRF, Grenoble Journal of Physics IV (2003), 104
2. V. Nazmov et al., "X-ray Lenses Fabricated by LIGA Technology" AIP Conference Proceedings Volume 879 (2007), 770-773
3. C. G. Schroer et al., "Nanofocusing parabolic refractive X-ray lenses" Applied Physics Letters 82 (2003), Vol. 9, 1485-1487
4. V. Aristov et al., "X-ray refractive planar lens with minimized absorption" Applied Physics Letters 77 (2000), Vol. 24, 4058
5. W. Jark, et al., "Focusing X-rays with simple arrays of prism-like structures" Journal of Synchrotron Radiation 11 (2004), 248-253
6. W. Jark, et al., "On the feasibility of large-aperture Fresnel lenses for the microfocusing of hard X-rays" Journal of Synchrotron Radiation 13 (2006), 239-252
7. F. Pérennès et al., "Fabrication of refractive X-ray focusing lenses by deep X-ray lithography" Microelectronic Engineering 78-79 (2005), 79-87