Fabrication of refractive X-ray focusing lenses by deep X-ray lithography

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 79-87

  Perennes F ^a   Matteucci, M ^a   Jark, W ^a   Marmiroli, B ^b  

^a SINCROTRONE TRIESTE   (Italy)

^b LABORATORIO TASC   (Italy)

Author keywords

Deep X ray lithography; Fresnel X ray lenses

Indexed keywords

ARRAYS; FABRICATION; LIGHT REFRACTION; POLYMETHYL METHACRYLATES; PRISMS; RADIOGRAPHY; SYNCHROTRONS; X RAY LITHOGRAPHY; X RAYS;

CONCAVE LENSES; DEEP X-RAY LITHOGRAPHY; FRESNEL X-RAY LENSES; NONFUNCTIONAL MATERIALS;

LENSES;

EID: 14944379124     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.012     Document Type: Conference Paper

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