Carbon nanotubes grown from nickel catalyst pretreated with H2/N2 plasma

Microelectronics Journal

Volumn 39, Issue 12, 2008, Pages 1572-1575

  Chang, Shang Chou ^a   Lin, Tien Chai ^a   Li, To Sing ^a   Huang, Sheng Han ^a  

^a KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

Carbon nanotube; H2 N2 plasma; Low temperature

Indexed keywords

AMPLIFICATION; CARBON; CATALYSIS; CATALYSTS; ELECTRIC FIELDS; FIELD EMISSION; FLAT PANEL DISPLAYS; HYDROGEN; NANOCOMPOSITES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; NICKEL; NICKEL ALLOYS; PLASMAS; TUBES (COMPONENTS);

AMPLIFICATION COEFFICIENTS; DISPLAY INDUSTRIES; FLAT PANEL DISPLAY INDUSTRIES; H2/N2 PLASMA; HIGH TEMPERATURES; HYDROGEN PLASMAS; LONG TUBES; LOW TEMPERATURE; LOW TEMPERATURES; LOW THRESHOLDS; NICKEL CATALYSTS; NICKEL PARTICLES; PRETREATMENT; PROCESS PRESSURES; TUBE DENSITIES;

CARBON NANOTUBES;

EID: 56249124972     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2008.02.025     Document Type: Article

References (15)

1. Iijima S. Helical microtubule of graphitic carbon. Nature 354 (1991) 56-58
2. Iijima S., and Ichihashi T. Single-shell carbon nanotubes of 1-nm diameter. Nature 363 (1993) 603-605
3. Rinzler A.G., Hafner J.H., Nikolaev P., Lou L., Kim S.G., Tomanek D., Nordlander P., Colbert D.T., and Smalley R.E. Field emission from random array of carbon nanotubes. Science 269 (1995) 1550-1553
4. de, Heer W.A., Chatelain A., and Ugarte D. Carbon nanotubes films: electronic properties and their application as field emitters. Z. Phys. D40 (1997) 418-420
5. Wang Q.H., Corrigan T.D., Dai J.Y., Chang R.P.H., and Krauss A.R. Field emission induced luminescence from carbon nanotubes. Phys. Rev. Lett. 81 (1998) 1441-1444
6. Bonard J.M. Field emission from carbon nanotubes: the first five years. Solid State Electron. 45 (2001) 893-914
7. Xua X., and Brandesb G.R. A method for fabricating large-area, patterned, carbon nanotube field emitters. Appl. Phys. Lett. 74 (1999) 2549-2551
8. Ebbesen T.W., and Ajayan P.M. Large scale synthesis of carbon nanotubes. Nature 358 (1992) 220-222
9. Guo T., Nikolaev P., Rinzler A.G., Tomanek D., Colbert D.T., and Smalley R.E. Self assembly of tubular fullerenes. J. Phys. Chem. 99 (1995) 10694-10697
10. Yen J.H., Leu I.C., Lin C.C., and Hon M.H. Effect of catalyst pretreatment on the growth of carbon nanotubes. Diamond Relat. Mater. 13 (2004) 1237-1241
11. Yang D.J., Zhang Q., and Yoon S.F. Effect of oxygen and nitrogen on carbon nanotube growth using a microwave plasma chemical vapor deposition technique. Surf. Coat. Technol. 167 (2003) 288-291
12. Chang S., Lin T., and Pai C. Low temperature process in growing carbon nanotube. Microelectron. J. 38 (2007) 657-662
13. 3 plasma pretreatment on the growth of carbon nanotubes. Diamond Relat. Mater. l15 (2006) 361-364
14. O'Hanlon J.F. A User's Guide to Vacuum Technology (1989), Wiley, New York p. 433
15. Musatov A.L., Kiselev N.A., Zakharov D.N., and Kukovitskii E.F. Field electron emission from nanotube carbon layers grown by CVD process. Appl. Surf. Sci. 183 (2001) 111-119