Low-temperature process in growing carbon nanotube

Microelectronics Journal

Volumn 38, Issue 6-7, 2007, Pages 657-662

  Chang, Shang Chou ^a   Lin, Tien Chai ^a   Pai, Chen Yu ^a  

^a KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

Carbon nanotube; Low temperature

Indexed keywords

FLAT PANEL DISPLAYS; LOW TEMPERATURE OPERATIONS; NICKEL COMPOUNDS; THIN FILMS;

FLAT PANEL DISPLAY INDUSTRY; MICROWAVE HYDROGEN PLASMA; MICROWAVE POWER; NICKEL PARTICLES;

CARBON NANOTUBES;

EID: 34547407885     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.06.002     Document Type: Article

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