High quality coupled ring resonators based on silicon clusters slot waveguide

2008 5th International Conference on Group IV Photonics, GFP

Volumn , Issue , 2008, Pages 215-217

  Lebour, Youcef ^a,b   Guider, Romain ^b   Jordana, Emmanuel ^c   Fedeli, Jean Marc ^c   Pellegrino, Paolo ^a   Hernández, Sergi ^a   Garrido, Blas ^a   Daldosso, Nicola ^b   Pavesi, Lorenzo ^c  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF TRENTO   (Italy)

^c CEA LETI   (France)

Author keywords

Deep UV lithography; Ring resonators; Sandwich slot waveguides; Si clusters

Indexed keywords

LITHOGRAPHY; OPTICAL RESONATORS; RESONATORS; SILICON;

DEEP UV LITHOGRAPHY; DUV LITHOGRAPHIES; HIGH QUALITIES; OPTICAL LOGIC GATES; Q FACTORS; RING RESONATORS; SANDWICH SLOT WAVEGUIDES; SI CLUSTERS; SILICON CLUSTERS; SLOT WAVEGUIDES; WAVEGUIDE STRUCTURES;

WAVEGUIDES;

EID: 56249106870     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/GROUP4.2008.4638149     Document Type: Conference Paper

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