Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator

Optics Communications

Volumn 282, Issue 1, 2009, Pages 22-26

  Huang, Qingzhong ^a   Yu, Yude ^a   Yu, Jinzhong ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Polarization; Resonators; Silicon on insulator; Submicron rib waveguides

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ETCHING; INDUCTIVELY COUPLED PLASMA; MICROSENSORS; OPTICAL WAVEGUIDES; PHOTORESISTS; PLASMA ETCHING; POLARIZATION; SILICON; WAVEGUIDES;

COUPLING REGIONS; EXPERIMENTAL INVESTIGATIONS; INDUCTIVELY COUPLED PLASMA ETCHINGS; LOW PROPAGATION LOSSES; MAGNETIC POLARIZATIONS; RIB HEIGHTS; RIB WAVEGUIDES; SIDEWALL ROUGHNESSES; SILICON ON INSULATORS; SILICON-ON-INSULATOR; SUB MICRONS; SUBMICRON RIB WAVEGUIDES; WAVEGUIDE DIMENSIONS;

RESONATORS;

EID: 56049112324     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2008.09.052     Document Type: Article

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