Tellurium sputtered thin films as NO2 gas sensors

Sensors and Actuators, B: Chemical

Volumn 135, Issue 1, 2008, Pages 250-254

  Siciliano, T ^a   Di Giulio, M ^a   Tepore, M ^a   Filippo, E ^a   Micocci, G ^a   Tepore, A ^a  

^a UNIVERSITY OF SALENTO   (Italy)

Author keywords

Gas sensors; Raman spectroscopy; rf sputtering; SEM; Te thin films

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL SENSORS; CONCENTRATION (PROCESS); GAS DETECTORS; GASES; GLASS; MICROSCOPIC EXAMINATION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SENSORS; SPECTRUM ANALYSIS; SUBSTRATES; SURFACE MORPHOLOGY; SURFACE STRUCTURE; TELLURIUM; TELLURIUM COMPOUNDS; THICK FILMS; THIN FILMS;

ALUMINA SUBSTRATES; AND RECOVERIES; DEPOSITED FILMS; GAS CONCENTRATIONS; GAS SENSITIVITIES; GAS SENSORS; GLASS SUBSTRATES; POLYCRYSTAL LINES; REPRODUCIBILITY; RESISTANCE VARIATIONS; RF SPUTTERING; RF SPUTTERING SYSTEMS; ROOM TEMPERATURES; SEM; SENSING PROPERTIES; SPUTTERED THIN FILMS; TE THIN FILMS; THICKNESS OF THE FILMS; WORKING TEMPERATURES; X-RAY DIFFRACTIONS;

AMORPHOUS FILMS;

EID: 56049108557     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2008.08.018     Document Type: Article

References (16)

1. Martin M. In: Cook J. (Ed). Passive Cooling (1989), MIT Press, Cambridge, MA (Chapter 4)
2. 2Te: application to radiative cooling devices. Thin Solid Films 370 (2000) 101-105
3. 2 gas sensor. Sens. Actuators B 73 (2001) 35-39
4. Tsiulyanu D., Marian S., and Liess H.-D. Sensing properties of tellurium based thin films to propylamine and carbon oxide. Sens. Actuators B 85 (2002) 232-238
5. Sen S., Bhandarkar V., Muthe K.P., Roy M., Deshpande S.K., Aiyer R.C., Gupta S.K., Yakhmi J.V., and Sahni V.C. Highly sensitive hydrogen sulphide sensors operable at room temperature. Sens. Actuators B 115 (2006) 270-275
6. Okuyama K., and Kudo H. Improved tellurium films by partially ionized vapor deposition as the semiconductor layer of a TFT and a hydrogen sensor. Jpn. J. Appl. Phys. 28 (1989) 770-775
7. Lou D.Y., Blom G.M., and Kenney G.C. Bit oriented optical storage with thin tellurium films. J. Vac. Sci. Technol. 18 (1981) 78-86
8. 2 detection. Thin Solid Films 485 (2005) 252-256
9. Bhandarkar V., Sen S., Muthe K.P., Kaur M., Kumar M.S., Deshpande S.K., Gupta S.K., Yakhmi J.V., and Sahni V.C. Effect of deposition conditions on the microstructure and gas-sensing characteristics of Te thin films. Mater. Sci. Eng. B 131 (2006) 156-161
10. Poborchii V.V. Raman spectra of sulphur, selenium or tellurium clusters confined in nano-cavities of zeolite A. Solid State Commun. 107 (1998) 513-518
11. Song H., Cho K., Kim H., Lee J.S., Min B., Kim H.S., Kim S.-W., Noh T., and Kim S. Synthesis and characterization of nanocrystalline mercury telluride by sonochemical method. J. Cryst. Growth 269 (2004) 317-323
12. Pine A.S., and Dresselhaus G. Raman spectra and lattice dynamics of tellurium. Phys. Rev. B 4 (1971) 356-371
13. Rath S., and Sahu S.N. Composition-dependent optical properties of nanocrystalline mercury telluride. Europhys. Lett. 67 (2004) 294-300
14. 2 sensing properties of tellurium based films. Sens. Actuators B 100 (2004) 380-386
15. Kastner M., and Fritzsche H. Defect chemistry of lone-pair semiconductors. Philos. Mag. B 37 (1978) 199-215
16. Mott N.F., and Davis E.A. Electron Processes in Non-Crystalline Materials (1979), Clarendon Press, Oxford