On the use of elastic peak electron spectroscopy (EPES) to measure the H content of hydrogenated amorphous carbon films

Surface and Interface Analysis

Volumn 40, Issue 11, 2008, Pages 1469-1474

  Filippi, M ^a   Calliari, L ^a  

^a ITC IRST   (Italy)

Author keywords

Elastic peak electron spectroscopy; Electron stimulated desorption; Hydrogen; Hydrogenated amorphous carbon

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; CARBON; CARBON FILMS; DESORPTION; ELECTRON SPECTROSCOPY; ELECTRONS; HYDROGEN; HYDROGENATION; HYDROGENOLYSIS; SELF ASSEMBLED MONOLAYERS;

ELASTIC PEAK ELECTRON SPECTROSCOPIES; ELASTIC PEAK ELECTRON SPECTROSCOPY; H CONTENTS; HYDROGENATED AMORPHOUS CARBON; HYDROGENATED AMORPHOUS CARBON FILMS; HYDROGENATED AMORPHOUS CARBONS; LOW INTENSITIES; PLASMON PEAKS; SPECTRAL INTERFERENCES;

AMORPHOUS CARBON;

EID: 55749114529     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2932     Document Type: Article

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