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Current Applied Physics

Volumn 9, Issue 1 SUPPL., 2009, Pages

Preparation of anodic aluminum oxide templates on silicon substrates for growth of ordered nano-dot arrays

(6) Jeong, S Y a,b An, M C a Cho, Y S a Kim, D J a Paek, M C b Kang, K Y b

a Chungnam National University (South Korea)

b Electronics and Telecommunications Research Institute (ETRI) (South Korea)

Author keywords

Anodic aluminum oxide; Nano template

Indexed keywords

ALUMINA; ALUMINUM; ANNEALING; ELECTROLYTES; GALLIUM ALLOYS; GALLIUM NITRIDE; LIGHT METALS; OXIDES; SEMICONDUCTING GALLIUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS; SILICON; SILICON WAFERS; SUBSTRATES;

AAO TEMPLATES; ALUMINUM FILMS; ANNEALING TIMES; ANODIC ALUMINUM OXIDE; ANODIC ALUMINUM OXIDE TEMPLATES; ANODIC POTENTIALS; AVERAGE DIAMETERS; DOT ARRAYS; ELECTROLYTE SOLUTIONS; NANO-TEMPLATE; OPTIMUM CONDITIONS; ORDERED ARRAYS; PROCESS VARIABLES; SILICON SUBSTRATES; WAFER SCALES;

ANODIC OXIDATION;

EID: 55649095511 PISSN: 15671739 EISSN: None Source Type: Journal
DOI: 10.1016/j.cap.2008.08.030 Document Type: Article

Times cited : (21)

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