High-efficiency micro structuring of VUV window materials by laser-induced plasma-assisted ablation (LIPAA) with a KrF excimer laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 557-567

  Jaber, Houssam ^a   Binder, Alexander ^a   Ashkenasi, David ^a,b  

^a Laser und Medizin Technologie GmbH   (Germany)

^b NONE   (Germany)

Author keywords

Calcium fluoride; Fused silica; KrF excimer laser; Laser induced plasma assisted ablation (LIPAA); Mask projection

Indexed keywords

CALCIUM COMPOUNDS; CRACK INITIATION; FUSED SILICA; INFRARED SPECTROSCOPY; KRYPTON; LASER ABLATION; LIGHT ABSORPTION; MASKS; MICROSTRUCTURE; OPTOELECTRONIC DEVICES; ULTRAVIOLET RADIATION;

CALCIUM FLUORIDE; KRF EXCIMER LASER; LASER-INDUCED PLASMA-ASSISTED ABBLATION (LIPAA); MASK PROJECTION;

EXCIMER LASERS;

EID: 5544306321     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529451     Document Type: Conference Paper

References (8)

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