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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 113-117

Fabrication of diffractive phase elements by F2-laser ablation of fused silica

(7) Schulz Ruhtenberg, Malte a Ihlemann, Jürgen a Marowsky, Gerd a Nejadmalayeri, Amir H b Ng, Mi L b Li, Jianzhao b Herman, Peter R b

a LASER LABORATORIUM GÖTTINGEN E V (Germany)

b UNIVERSITY OF TORONTO (Canada)

Author keywords

Ablation; Diffractive phase elements; F2 laser; Fused silica

Indexed keywords

ALGORITHMS; ARRAYS; CALCIUM COMPOUNDS; FOURIER TRANSFORMS; ITERATIVE METHODS; LASER ABLATION; LASER BEAM EFFECTS; LITHOGRAPHY; SURFACE STRUCTURE; ULTRAVIOLET RADIATION;

BEAM HOMOGENIZATION; DIFFRACTIVE PHASE ELEMENTS; ITERATIVE FOURIER TRANSFORM ALGORITHM (IFTA);

FUSED SILICA;

EID: 2342545498 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.541070 Document Type: Conference Paper

Times cited : (8)

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