Fabrication of surface plasmon waveguides and integrated components on ultrathin freestanding membranes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 6, 2008, Pages 1383-1391

  Berini, Pierre ^a,b   Lahoud, Nancy ^a   Charbonneau, Robert ^c  

^a UNIVERSITY OF OTTAWA   (Canada)

^b Spectalis Corp   (Canada)

^c DEFENCE RESEARCH AND DEVELOPMENT CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; PLASMONS; SILICON;

CHARACTERISATION; FABRICATION PROCESSES; FREESTANDING MEMBRANES; POINT FORCES; POLARITON; PROCESS STEPS; SI SUBSTRATES; SURFACE PLASMONS;

WAVEGUIDES;

EID: 55349100205     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2975196     Document Type: Article

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