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Volumn 47, Issue 5 PART 1, 2008, Pages 3418-3422
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A capacitive sensing scheme for control of movable element with complementary metal-oxide-semiconductor microelectoromechanical-systems device
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Author keywords
Capacitive sensing; CMOS MEMS; Control; Movable structure; Parasitic capacitance
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Indexed keywords
BANDPASS FILTERS;
COMPOSITE MICROMECHANICS;
DIELECTRIC DEVICES;
ELECTRIC CONDUCTIVITY;
LSI CIRCUITS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
PLATES (STRUCTURAL COMPONENTS);
SEMICONDUCTING INDIUM;
SEMICONDUCTOR MATERIALS;
SENSOR NETWORKS;
AIR GAPS;
CAPACITIVE;
CAPACITIVE SENSING;
CMOS PROCESSES;
CMOS-MEMS;
COMPLEMENTARY;
DETECTION CIRCUITS;
DETECTION SENSITIVITIES;
MEMS DEVICES;
MEMS PROCESSES;
MEMS VARIABLE CAPACITORS;
MOVABLE STRUCTURE;
OUTPUT VOLTAGES;
PARASITIC CAPACITANCE;
PARASITIC CAPACITANCES;
SENSING CIRCUITS;
SENSING SCHEMES;
CAPACITANCE;
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EID: 55049095130
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.3418 Document Type: Article |
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Times cited : (4)
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References (7)
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