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Volumn 48, Issue 5-7, 2008, Pages 473-479
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Ion-conducting probes for low temperature plasmas
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Author keywords
Heated probe; Langmuir probe; rf discharge; Solid electrolyte; Yttria stabilized zirconia
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Indexed keywords
ELECTRIC DISCHARGES;
IONS;
LANGMUIR PROBES;
OXYGEN;
TEMPERATURE;
YTTRIA STABILIZED ZIRCONIA;
YTTRIUM OXIDE;
CONDUCTING MATERIALS;
CONDUCTING PROBES;
ELECTRON CONDUCTING;
ELEVATED TEMPERATURE;
HEATED PROBE;
ION-CONDUCTING;
LOW TEMPERATURE PLASMAS;
OXYGEN IONS;
RF DISCHARGE;
YTTRIA-STABILIZED-ZIRCONIA;
SOLID ELECTROLYTES;
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EID: 54549108823
PISSN: 08631042
EISSN: 15213986
Source Type: Journal
DOI: 10.1002/ctpp.200810076 Document Type: Conference Paper |
Times cited : (8)
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References (19)
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