메뉴 건너뛰기




Volumn 23, Issue 10, 2008, Pages 2774-2786

High-temperature electrical behavior of nanocrystalline and microcrystalline diamond films

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ARGON; COMPOSITE MICROMECHANICS; CONCENTRATION (PROCESS); CURRENT VOLTAGE CHARACTERISTICS; DIAMOND CUTTING TOOLS; DIAMONDS; ELECTROMECHANICAL DEVICES; GAS DYNAMICS; GAS PERMEABLE MEMBRANES; GASES; INERT GASES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; NANOCRYSTALLINE ALLOYS; NANOCRYSTALLINE MATERIALS; NANOSTRUCTURED MATERIALS; NITROGEN; WATER POLLUTION;

EID: 54449097531     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0330     Document Type: Article
Times cited : (13)

References (17)
  • 1
    • 54449093209 scopus 로고    scopus 로고
    • edited by M.A. Prelas, G. Popovici, and L.K. Bigelow Marcel Dekker Inc, New York
    • P.J. Gielisse: Handbook of Industrial Diamonds and Diamond Films, edited by M.A. Prelas, G. Popovici, and L.K. Bigelow (Marcel Dekker Inc., New York, 1998) p. 51.
    • (1998) Handbook of Industrial Diamonds and Diamond Films , pp. 51
    • Gielisse, P.J.1
  • 3
    • 0000839213 scopus 로고    scopus 로고
    • Ultrananocrystalline diamond in the laboratory and the cosmos
    • D.M. Gruen: Ultrananocrystalline diamond in the laboratory and the cosmos. MRS Bull. 26(10), 771 (2001).
    • (2001) MRS Bull , vol.26 , Issue.10 , pp. 771
    • Gruen, D.M.1
  • 7
    • 21544462241 scopus 로고
    • Comparison of the electrical properties of simultaneously deposited homoepitaxial and polycrystalline diamond films
    • D.M. Malta, J.A. von Windheim, H.A. Wynands, and B.A. Fox: Comparison of the electrical properties of simultaneously deposited homoepitaxial and polycrystalline diamond films. J. Appl. Phys. 77(4), 1536 (1995).
    • (1995) J. Appl. Phys , vol.77 , Issue.4 , pp. 1536
    • Malta, D.M.1    von Windheim, J.A.2    Wynands, H.A.3    Fox, B.A.4
  • 8
    • 51249166338 scopus 로고
    • Electrical characterization of semiconducting diamond thin films and single crystals
    • J.A. von Windheim, V. Venkatesan, D.M. Malta, and K. Das: Electrical characterization of semiconducting diamond thin films and single crystals. J. Electron. Mater. 22(4), 391 (1992).
    • (1992) J. Electron. Mater , vol.22 , Issue.4 , pp. 391
    • von Windheim, J.A.1    Venkatesan, V.2    Malta, D.M.3    Das, K.4
  • 9
    • 15744366142 scopus 로고    scopus 로고
    • N-type electric conductivity of nitrogen-doped ultrananocrystalline diamond films
    • Y. Dai, D. Dai, C. Yan, B. Huang, and S. Han: N-type electric conductivity of nitrogen-doped ultrananocrystalline diamond films. Phys. Rev. B 71, 075421 (2005).
    • (2005) Phys. Rev. B , vol.71 , pp. 075421
    • Dai, Y.1    Dai, D.2    Yan, C.3    Huang, B.4    Han, S.5
  • 10
    • 0004106719 scopus 로고    scopus 로고
    • edited by M.H. Nazare and A.J. Neves INSPEC, The Institution of Electrical Engineers, London, UK
    • C.E. Nebel and M. Stutzmann: Properties, Growth and Applications of Diamond, edited by M.H. Nazare and A.J. Neves (INSPEC, The Institution of Electrical Engineers, London, UK, 2001), p. 40.
    • (2001) Properties, Growth and Applications of Diamond , pp. 40
    • Nebel, C.E.1    Stutzmann, M.2
  • 11
    • 0000419012 scopus 로고
    • Compensation effects in nitrogen-doped diamond films
    • J. Mort, M.A. Machonkin, and K. Okumura: Compensation effects in nitrogen-doped diamond films. Appl. Phys. Lett. 59(24), 3148 (1991).
    • (1991) Appl. Phys. Lett , vol.59 , Issue.24 , pp. 3148
    • Mort, J.1    Machonkin, M.A.2    Okumura, K.3
  • 12
    • 0030106639 scopus 로고    scopus 로고
    • Boron-doped homoepitaxial diamond layers: Fabrication, characterization and electronics applications
    • T.H. Borst and O. Weis: Boron-doped homoepitaxial diamond layers: Fabrication, characterization and electronics applications. Phys. Status Solidi A 154, 423 (1996).
    • (1996) Phys. Status Solidi A , vol.154 , pp. 423
    • Borst, T.H.1    Weis, O.2
  • 13
    • 0037343434 scopus 로고    scopus 로고
    • The boron acceptor in diamond
    • S
    • K. Thonke: The boron acceptor in diamond. Semicond. Sci Technol. 18(3), S20 (2003).
    • (2003) Semicond. Sci Technol , vol.18 , Issue.3 , pp. 20
    • Thonke, K.1
  • 14
    • 0001312821 scopus 로고
    • Electrical conduction in undoped diamond films prepared by chemical vapor deposition
    • Y. Muto, T. Sugino, J. Shirfuji, and K. Kobashi: Electrical conduction in undoped diamond films prepared by chemical vapor deposition. Appl. Phys. Lett. 59(7), 843 (1991).
    • (1991) Appl. Phys. Lett , vol.59 , Issue.7 , pp. 843
    • Muto, Y.1    Sugino, T.2    Shirfuji, J.3    Kobashi, K.4
  • 15
    • 0001374947 scopus 로고    scopus 로고
    • Poole-Frenkel conduction in polycrystalline diamond
    • P. Gonon, Y. Boiko, S. Prawer, and D. Jamieson: Poole-Frenkel conduction in polycrystalline diamond. J. Appl. Phys. 79(7), 3778 (1996).
    • (1996) J. Appl. Phys , vol.79 , Issue.7 , pp. 3778
    • Gonon, P.1    Boiko, Y.2    Prawer, S.3    Jamieson, D.4
  • 16
    • 0000440722 scopus 로고
    • On the substitutional nitrogen donor in diamond
    • R.G. Farrer: On the substitutional nitrogen donor in diamond. Solid State Comm. 7, 685 (1969).
    • (1969) Solid State Comm , vol.7 , pp. 685
    • Farrer, R.G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.