Mechanical wave propagation at phase- and material interfaces of microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5392, Issue , 2004, Pages 203-210

  Vollmann, Jacqueline ^a   Profunser, Dieter M ^a   Goossens, Jozefien ^a   Dual, Jürg ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Functionally Graded Material (FGM); In depth profiling; Laser acoustics; Material interfaces; MEMS inspection; Wave propagation

Indexed keywords

ACOUSTIC IMPEDANCE; CHEMICAL ANALYSIS; ELASTIC MODULI; ELASTIC WAVES; FUNCTIONALLY GRADED MATERIALS; INTERFACES (MATERIALS); MECHANICAL WAVES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRESS ANALYSIS; WAVE PROPAGATION;

IN-DEPTH PROFILING; LASER ACOUSTICS; MECHANICAL WAVE PROPAGATION;

MICROSTRUCTURE;

EID: 5444264643     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.543789     Document Type: Conference Paper

References (5)

1. C. Thomsen et. al., 'Surface Generation and Detection of Phonons by Picosecond Light Pulses', Physical Review B, Vol. 34, No 6, 1986, pp. 4129-4138.
2. C. Thomsen, H.J. Maris, J. Taue, 'Picosecond Acoustics as a Non-Destructive Tool for the Characterization of very thin Films', Thin Solid Films, Vol. 154, 1987, pp. 217-223.
3. D.M. Profunser, J. Vollmann, J. Bryner, J. Dual, 'Measurement and simulation of the laserbased thermo-elastic excitation and propagation of acoustic pulses for thin film and MEMS inspection', SPIE Proceedings, Vol. 4703, pp. 21-30, 2002.
4. J. Vollmann, D.M. Profunser, and J. Dual, 'Sensitivity improvement of a pump-probe set-up for thin film and microstructure metrology', Ultrasonics, Vol. 40/1-8, pp. 757-763, Elsevier Science, Amsterdam, 2002.
5. J. Vollmann, D.M. Profunser, A.H. Meier, M. Döbeli, J. Dual, 'Pulse laser acoustics for the characterization of inhomogeneities at interfaces of microstructures', Ultrasonics, Elsevier Science, Amsterdam, to appear in spring 2004.