Pulse laser acoustics for the characterization of inhomogeneities at interfaces of microstructures

Ultrasonics

Volumn 42, Issue 1-9, 2004, Pages 657-663

  Vollmann, Jacqueline ^a   Profunser, Dieter M ^a   Meier, Andreas H ^a   Döbeli, Max ^a   Dual, J ürg ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Diffusion; Functionally Graded Material (FGM); In depth profiling; Laser acoustics; MEMS inspection; Wave propagation

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE REFLECTION; ACOUSTIC WAVE TRANSMISSION; COMPUTER SIMULATION; DIFFUSION; EMISSION SPECTROSCOPY; INTERFACES (MATERIALS); LASER PULSES; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

FUNCTIONALLY GRADED MATERIALS (FGM); IN DEPTH PROFILING; LASER ACOUSTICS;

ULTRASONICS;

EID: 1642601662     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2004.01.054     Document Type: Conference Paper

References (6)

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