Analysis of debris generated during UV laser micro-machining of silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 241-249

  O'Connor, Gerard M ^a   Howard, Helen ^a   Conneely, Alan J ^a   Glynn, Thomas J ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Laser generated debris; Laser micromachining; Particulate entrapment; Process characterisation; Shadowgraphy; Silicon

Indexed keywords

COMPOSITION; DEBRIS; EMISSION SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; LASER ABLATION; MICROMACHINING; PLASMAS; SCANNING ELECTRON MICROSCOPY;

LASER GENERATED DEBRIS; LASER MICROMACHINING; PARTICULATE ENTRAPMENT; PROCESS CHARACTERIZATION; SHADOWGRAPHY;

SILICON;

EID: 5444256823     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529248     Document Type: Conference Paper

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